A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors
- Creator: Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2016
High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy
- Creator: Maroufi, Mohammad , Fowler, Anthony G. , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
Tilted beam piezoresistive displacement sensor: design, modeling, and characterization
- Creator: Maroufi, Mohammad , Bazaei, Ali , Mohammadi, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015